Prof. Boris Svilicic
Prof. Boris Svilicic
University of Rijeka, Croatia
Title: Widely Tunable MEMS Resonators with Electrothermal Actuation and Piezoelectric Sensing
Electrically tunable filters with a wide tunable range are key components in both multiband communication systems and wide-band tracking receivers, as they possess the ability to replace filter banks. Micro-electro-mechanical system (MEMS) resonators have been extensively researched as a potential candidate technology for realization of a variety of devices including filters and frequency references. Tunable filters based on MEMS resonator technology provide the ability to create low power frequency tuning with high Q factor while simultaneously reducing parts count, size, weight and price. Electrothermal actuation is an emerging transduction technique that brings advantages such as simple fabrication process, low actuation voltages, impedance matching and wide frequency tuning range that can be obtained by applying low DC bias voltages. The use of piezoelectric transduction for electrical sensing allows active generation of electrical potential in response to an applied mechanical stress, and thus obviating the need of external bias voltage source. Electrothermally actuated and piezoelectrically sensed MEMS resonators have been fabricated with two different resonant structures: double-clamped beam and diaphragm. Electrical characterization of the devices has been performed by measuring the two-port transmission frequency response. Details on devices’ design, materials, fabrication process and testing procedure will be presented.
Boris Sviličić is currently a full professor with the Faculty of Maritime Studies, University of Rijeka, Croatia. He received the diploma in electrical engineering (5 year curricula) from the Faculty of Electrical Engineering and Computing, University of Zagreb, Croatia, in 1999. Master of science and doctorate of science degrees in electronics engineering he received from the same institution in 2003 and 2008 respectively. From 2010 to 2011, he was working as a visiting postdoctoral research fellow at the Institute for Integrated Micro and Nano Systems, Scottish Microelectronics Centre, University of Edinburgh, U.K. His research interests involve design, simulation, fabrication and characterization of micro-electro-mechanical systems (MEMS) and electro-mechanical transduction techniques for microsystems.