Biography
Dr. Zhuoqing Yang
Dr. Zhuoqing Yang
Shanghai Jiao Tong University, China
Title: MEMS sensors and actuators based on 3D micro-fabrication technologies for wearable devices and IoT applications
Abstract: 
With the development of the Internet of Things (IoT), wearable devices and implantable biomedical components, the flexible sensors, actuators and electrical circuits have been demanded more and more widely. Microelectromechanical systems (MEMS) devices based on 3D micro-fabrication technologies have attracted a great deal of attention due to their small size, lower costs, large volume production and low consumption. This speech will focus on the design and micro fabrication of three typical sensors/actuators (3D integration sensors fabrication on fibers or capillary surface, passive ultra-low power inertial sensor, micro vibration energy harvester) and their potential applications on wearable devices and IoT fields.
Biography: 

Zhuoqing Yang received the B.Sc. and the M.Sc. degree in electromechanical engineering from Harbin Engineering University (HEU), Harbin, China, in 2003 and 2005, respectively. He received the Ph. D. degree in microelectronics and solid state electronics from Shanghai Jiao Tong University (SJTU), Shanghai, China, in 2010. Then, he stayed in the Research Institute of Micro/Nano Science and Technology at SJTU as an Assistant Professor, and he spent 2011 through 2013 as a JSPS Postdoctoral Fellow in National Institute of Advanced Industrial Science and Technology (AIST) in Japan. He went back to SJTU in 2014, where he is now Associate Professor in the School of Electronic Information and Electrical Engineering. He is also Resident Researcher at the National Key Laboratory of Science and Technology on Micro/Nano Fabrication, China. 


Research Interests: Zhuoqing Yang is focused on the design, simulation and fabrication of MEMS/NEMS sensors and actuators (Especially, MEMS inertial switch, i.e., acceleration microswitch/G-switch) and 3D fabrications on the surface of flexible fiber for biomedical applications. He proposed several novel designs of contact-enhanced MEMS inertial switches, which significantly prolong the switch-on time and reduce the bouncing effect. He also developed a programmable UV lithography system with multi-layer alignment for cylindrical substrates. By using this system various microstructures with different patterns, biomedical sensors and actuators (such as micro temperature and micro endoscope) could be developed on an ultra-thin tube or fiber surface for promising biomedical applications. 


Professional Activities and Awards: Zhuoqing Yang is an active member of the Institute of Electrical and Electronics Engineers (IEEE). He was the recipient of the Shanghai Municipal Technological Invention Award 1st rank prize (2016), Outstanding Paper Award of Chinese Mechanical Engineering Society (2008), and Best Paper Award of JCK MEMS/NEMS 2013 Int. Conf. (2013). He is selected as the Shanghai Pujiang Program Talent in 2014. In addition to being a frequent contributor to international journals and conferences, including Scientific Reports, IEEE/ASME Journal of Microelectromechanical Systems (JMEMS),IEEE Transactions on Electron Devices, Lab on a Chip, IEEE Transactions on Industrial Electronics, IOP Journal of Micromechanics and Microengineering (JMM), Sensors and Actuators A: Physical, IEEE MEMS, TRANSDUCERS, IEEE SENSORS, μTAS, DTIP and so on. He is also an editorial board member of International Journal of Sensors and Sensor Networks (IJSSN). He is invited as the TPC members and section chairs for several international conferences (ICMAE2016, MDCE2016 and SJTU-ICA bilateral seminar, etc), and given keynote/oralpresentations. He is now the principal investigator of several projects including NSFC and “863 Program” sub-projects, and holds more than twenty China patents and one Japan patent.